Linear synchronous iron-less motor -- 2D manipulator

Direct drive systems

Precision 2D manipulator
on the base of linear iron-less motors.

Possible application: task of precision movements in microelectronics.

Movement on X, Y, mm

160

Position accuracy on axis X, Y

1,3 micron

Velocity error of each of axes X, Y at fulfilment of a task at speed (10 mm / c) sin p t, micron, no more

2 micron

Maximal velocity

1 m/s

Motor type

AC synchronous, iron-less

Position encoder

X, Y: RENISHAW RGH-40A

HOME

Movement on X, Y, mm	160
Position accuracy on axis X, Y	1,3 micron
Velocity error of each of axes X, Y at fulfilment of a task at speed (10 mm / c) sin p t, micron, no more	2 micron
Maximal velocity	1 m/s
Motor type	AC synchronous, iron-less
Position encoder	X, Y: RENISHAW RGH-40A