Direct drive systems

2D cross table
on the base of linear stepper motors with air-bearing.

stepping motor -- cross table
Possible application: task of precision movements in microelectronics.
 
Movement on X, Y, mm
  • 160 
Position accuracy on axis X, Y
  • 5 micron 
Maximal velocity
  • 1 m/s 
Motor type
  • linear stepper motors
Position encoder
  • X, Y: RENISHAW RGH-22B 

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