Precision manipulator on linear synchronous motors.+

Direct drive systems

Precision 2D manipulator on the base of linear iron-less motors
with RGX planar encoder system (grid plate).

manipulator on base linear synchronous iron-less motor

Possible application: semiconductor and electronic manufacturing equipment.

Movement on X, Y, mm

70 x 70

Position accuracy on axis X, Y

+/-2 micron

Maximal velocity

0.5 m/s

Motor type

AC synchronous, iron-less

Position encoder

X, Y: RENISHAW RGH-42B

HOME

Movement on X, Y, mm	70 x 70
Position accuracy on axis X, Y	+/-2 micron
Maximal velocity	0.5 m/s
Motor type	AC synchronous, iron-less
Position encoder	X, Y: RENISHAW RGH-42B