Stepping motors -- Linear Planar Servo Motor

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LINEAR PLANAR STEP MOTORS (dual axes XY stepping motors)

two planar servomotors with Hall-sensors feedback

Short design description of planar motor.

A linear planar stepping motor consists of a forcer and stator . The stator is made as a flat plate that carries on its working surface a spaced toothed structure. The forcer contains two groups of orthogonal electromagnetic modules. The working surface of electromagnetic modules has a spaced toothed structure with a definite phase shift from pole to pole. To create an air cushion between one stator and the forcer the latter is provided with a built-in pneumatic system with jets.
We are produce two types of motors: planar motor without position feedback and planar servomotor with with Hall-sensors (HS) feedback.

Advantages and specific features:

The Ruchservomotor JV planar servomotors - the planar (XY) motor can make rotary movement at staying in position within +/- 2 thread periode of stator(as usually 1 periode=0.64 or 1.00mm) (motors with Hall-sensors feedback only).
Air-magnetic bearing - guarantee excellent repeatability and high durability of coordinate system
Free motion in two axes.
Positioning in any space of plane.
High velocity, up-to 1,7m/s
Compact, low profile design.
Simple design of a multi-coordinate system in one stator by increasing the number of forcers.
Possible to operate up side down or on sloping stator surface
Several coordinate systems with intersecting trajectories in one plane are possible.

Possible fields of application.

Assembly operations in microelectronics and instrument engineering:
LSI and VLSI unwelding.
Probe monitoring.
Crystal fitting.
Surface mounting elements and units assembly.
Printed circuit board control.
Laser technological complexes.
Measuring machines.

Planar motor forces and moments

Technical data and overall dimension of the forcers

Measurement unit	PRM-P-1.00- 122-130-18	PRM-P-0.64- 146-154-18	PRM-P-0.64- 120-240-25	PRM-P-1.00- 181-240-25	PRM-P-1.00- 230-280-25	PRM-P-0.64-146-154-23	PRM-P-0.64-168-320-34	PRM-P-0.64- 156-320-30	PRM-P-0.64- 175-320-30-HS	PRM-P-0.64- 154-221-25	PRM-P-0.64- 154-184-28-HS	PRM-P-0.64- 115-115-23	PRM-P-0.64- 380-360-48-HS	PRM-P-0.64- 115-154-23
Overall dimensions of the forcer (AxBxH) (mm)	122 x 130 x 18	146 x 154 x 18	120 x 240 x 25	181 x 240 x 25	230 x 280 x 25	146 x 154 x 23	168 x 320 x 34	156 x 320 x 30	175 x 320 x 30	154 x 221 x 25	154 x 184 x 28	115 x 115 x 23	380 x360 x 48	115 x154 x 23
Mass, kg	0,7	1,1	1,5	2,1	3.2	1.8	4.3	3.7	3.7	2.3	1.7	0.7	12.0	1.2
Compressed air consumption (litr/min)	4	4	6	9	17.5	6.6	12.8	21	21	11.6	6.4	3.2	36.2	5.0
Rated current I, (A)	3.0	3.0	3.0	3.0	3.0	3.0	3.0	3.0	3.0	3.0	3.0	3.0	6.0	3.0
Resistance (Ohm)	3,9	5,6	4,0	3,9	2.5	1.5	2.3	1.5	1.5	1.4(0.8)	0.8	0.5	0.4	0.5
Inductance (mH)	8.1	11	8.4	8.1	6.3	1.3	4.6	3.6	3.6	3.6(1.8)	1.9	0.8	0.9	0.8
Holding force,N: coordinate X coordinate Y	25 25	50 50	68 68	90 90	170 170	75 75	180 180	140 140	140 140	140 70	75 75	28 28	350 350	25 25
Repeatability accuracy, (micron)	3	3	3	3	3	3	3	3	3	3	3	3	3	3
Positioning accuracy (micron)	±25	±25	±25	±25	±15	±10	±10	±15	±10	±10	±10	±10	±10	±10
Resolution (micron)	3	3	3	3	3	1	1	1	1	1	1	1	1	1
Attraction force Fz, (N)	187	360	510	675	1275	560	1350	1000	1000	830	560	200
Payload Ft, (N)	145	290	390	530	980	430	1000	800	800	650	430	160	1500	150
Moment Mbr, (Nm)	1.5	3.2	6.9	9.2	20.2	4.9	24.4	17	19	11.9	5.8	1.5	56.4	1.6
Overall and join dimension	Show	Show	Show	Show	Show	Show	Show	Show	Show	Show	Show	Show	Show	Show

Operating air pressure 3.2+/-0.1Bar

HS - motor has built-in Hall-sensor feedback

Planar motors datasheet in PDF