Direct drive systems

      "Ruchservomotor"

PRECISION 3D POSITIONER ON BASE OF LINEAR SYNCHRONOUS MOTORS

 

WIRE-BONDER on base of linear synchronous motors

wirebonder 3D positioner

 

¹
Parameter
Unit
Specification
1
Movement X, Y, Z
mm
220 x 120 x12
2
 Peak dynamic force
N
200 (I=10Arms)
3
Number of forcers phases
3
4
Maximal velocity
m/s
2
5
Peak acceleration
m/sec2
20
6
Position error
mkm
5 *
7
Resolution
mkm
0.03
8
Repeatability
mkm
1 *
9
XYZ positioner weigth
kg
~ 65
10
Overall dimensions (axis Z in top position)
mm
545x480x170
11
Position encoder
Renishaw RGH22B 1Vptp

 

Photo of XYZ positioner for WIRE-BONDER

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